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A Major Breakthrough in Optoelectronic Chip Manufacturing: Chinese Scientists Obtained the First Nanoscale Photoengraving 3D Structure
发表时间:2022-09-15     阅读次数:     字体:【

On September 15, it was reported that on the night of September 14, the international top academic journal Nature published a major breakthrough in the field of next-generation optoelectronic chip manufacturing by the research team led by Zhang Yong, Xiao Min and Zhu Shining of Nanjing University, according to the WeChat official account of Nanjing University. The scientific research team has invented a new type of "non reciprocal femtosecond laser polarized ferroelectric domain" technology, which focuses femtosecond pulsed laser light on the interior of the material "lithium niobate" crystal. By controlling the direction of laser movement, an effective electric field is formed inside the crystal, achieving direct writing and erasing of three-dimensional structures. This new technology has broken through the light diffraction limit of traditional femtosecond lasers, and reduced the size of the three-dimensional structure of light carving lithium niobate from the traditional 1 micron scale (equivalent to one-fiftieth of the size of hair) to the nanometer scale for the first time, reaching 30 nanometers, greatly improving the processing accuracy.


这一重大发明,未来或可开辟光电芯片制造新赛道,有望用于光电调制器、声学滤波器、非易失铁电存储器等关键光电器件芯片制备,在 5G / 6G 通讯、光计算、人工智能等领域有广泛的应用前景。

This major invention may open up a new track for the manufacturing of optoelectronic chips in the future, and is expected to be used in the preparation of key optoelectronic devices such as optoelectronic modulators, acoustic filters, and nonvolatile ferroelectric memories. It has broad application prospects in fields such as 5G/6G communication, optical computing, and artificial intelligence.


这一工作将飞秒激光极化技术与铌酸锂铁电畴工程有机结合,突破了传统技术的壁垒,首次在三维空间实现了纳米铁电畴可控制备。将其应用于量子光学领域,可实现高效、高维和窄线宽量子纠缠产生;在电子学领域,可以推动高性能铁电畴壁纳米电子器件的发展,譬如大容量可重写非易失性存储器;在声学领域,纳米周期的铁电畴结构可以实现超高频声学谐振器和滤波器。飞秒激光极化技术可以进一步应用于其他铁电晶体,包括钽酸锂和磷酸钛钾晶体等,并促进高性能三维光、声、电集成器件的发展。

This work combines femtosecond laser polarization technology with lithium niobate ferroelectric domain engineering, breaking through the barriers of traditional technology, and achieving the controllable preparation of nano ferroelectric domains in three-dimensional space for the first time. Applying it to the field of quantum optics can achieve efficient, high-dimensional, and narrow linewidth quantum entanglement generation; In the field of electronics, it can promote the development of high-performance ferroelectric domain wall nano electronic devices, such as large capacity rewritable nonvolatile memories; In the field of acoustics, nano periodic ferroelectric domain structures can be used to implement ultra high frequency acoustic resonators and filters. Femtosecond laser polarization technology can be further applied to other ferroelectric crystals, including lithium tantalate and potassium titanium phosphate crystals, and promote the development of high-performance three-dimensional optical, acoustic, and electrical integrated devices.


Femtosecond Laser 3D Printing of Nanoferroelectric Domains


该项研究工作得到了科技部国家重点研发计划、国家自然科学基金、固体微结构物理国家重点实验室和人工微结构科学与技术协同创新中心的支持。

This research work has been supported by the National Key R&D Program of the Ministry of Science and Technology, the National Natural Science Foundation of China, the State Key Laboratory of Solid Microstructure Physics and the Collaborative Innovation Center for Artificial Microstructure Science and Technology.




 
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